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无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

聚乙二醇对纳米多孔二氧化硅薄膜性能的影响

王娟; 张长瑞; 冯坚   

  1. 国防科技大学航天与材料工程学院新型陶瓷纤维及其复合材料国防科技重点实验室, 长沙 410073
  • 收稿日期:2004-03-22 修回日期:2004-04-12 出版日期:2005-03-20 网络出版日期:2005-03-20

Effects of Poly(Ethylene glycol) on Properties of Nanoporous Silica Film

WANG Juan; ZHANG Chang-Rui; FENG Jian   

  1. Key Lab of Novel Ceramic Fibers & Composites; College of Aerospace and Material Engineering; National University of Defense Technology; Changsha 410073; China
  • Received:2004-03-22 Revised:2004-04-12 Published:2005-03-20 Online:2005-03-20

PDF (PC)

1497

被引次数

40

摘要： 以聚乙二醇(PEG)为添加剂,正硅酸乙酯(TEOS)为先驱体,采用溶胶-凝胶法、结合 旋转涂胶和超临界干燥等工艺在硅片上制备了纳米多孔SiO2薄膜.利用FTIR、TG-DTA、 AFM和椭偏仪研究了该SiO2薄膜的性能.与未加.PEG的SiO2薄膜相比,加入PEG得到 的SiO2薄膜表面粗糙度增大,但孔隙率较高,介电常数可降至2.0以下.PEG参与并修饰了 TEOS的溶胶-凝胶过程.加入PEG制备的SiO2薄膜因含有Si-OH基团而呈亲水性,该薄 膜经三甲基氯硅烷(TMCS)修饰后为疏水性.

关键词: 纳米多孔二氧化硅薄膜, 溶胶-凝胶, 聚乙二醇, 低介电常数

Abstract: Crack-free homogeneous nanoporous silica films on silicon wafers were synthesized via supercritical drying of wet gel films obtained by spin coating the polymeric silica sol using the sol-gel method
with tetraethoxysilane(TEOS) as precursor and poly(ethylene glycol)(PEG) as additive. The nanoporous silica films were characterized by FTIR, TG-DTA, AFM and spectroellipsometer. The surface of silica
films prepared with PEG was rough compared to that of films without PEG. The silica film with PEG had higher porosity and lower dielectric constant. Its dielectric constant could be reduced below 2.0.
PEG not only participated in but also modified the sol-gel process of TEOS. The silica film with PEG originally was hydrophilic because of its Si--OH structure and then became hydrophobic after modified
with trimethylchlorosilane(TMCS).

Key words: nanoporous silica film, sol-gel, poly（ethylene glycol）, low dielectric constant

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