碳纤维无催化剂法制备β-SiC纳米晶须

无机材料学报

碳纤维无催化剂法制备β-SiC纳米晶须

吴艳军; 张亚非; 杨忠学; 吴建生

上海交通大学"薄膜与微细技术"教育部重点实验室微纳米科学技术研究院, 上海 200030

收稿日期:2004-04-23 修回日期:2004-06-10 出版日期:2005-05-20 网络出版日期:2005-05-20

Catalyst-free Method of Preparing β-SiC Nanowhiskers by Using Carbon Whiskers

WU Yan-Jun; ZHANG Ya-Fei; YANG Zhong-Xue; WU Jian-Sheng

Key Lab of " Thin Film and Micro-Fabrication " Ministry of Education; the Research Institute of Micro/Nano Science and Technology; Shanghai Jiaotong University; Shanghai 200030; China

Received:2004-04-23 Revised:2004-06-10 Published:2005-05-20 Online:2005-05-20

摘要/Abstract

摘要： 介绍了使用碳纤维为固相碳源,无催化剂加入制备β-SiC纳米晶须的一种新方法. 制备了直径为10-40nm,长度为几个微米的纯度较高的β-SiC纳米晶须.讨论了这个制备方法的特点,并比较了几种不同制备方法的优缺点.同时分析了β-SiC纳米晶须的显微组织并探讨了其生长机理.研究表明,较高的生长温度、SiO和CO的局部过饱和蒸汽压是此方法能够大量制备β-SiC纳米晶须的关键因素.

关键词: SiC纳米晶须, 制备技术, 纳米电子材料

Abstract: A novel catalyst-free method of preparing β-SiC nanowhiskers by using carbon fibres as solid carbon source was presented. A large quantities of β-SiC nanowhiskers with 10-40nm diameter and micrometer-scale length were successfully produced without catalyst. The features of this method were given. Compared with other preparing methods, the micro-structures of the β-SiC nanowhiskers and the growth mechanism were discussed. The research shows that the relatively high heating-temperature, the partial supersaturation of SiO, and partial supersaturation of CO are the key preparing factors.

Key words: β-SiC nanowhisker, preparing technology, nano-electronic material

中图分类号:

TN304

吴艳军,张亚非,杨忠学,吴建生. 碳纤维无催化剂法制备β-SiC纳米晶须[J]. 无机材料学报.

WU Yan-Jun,ZHANG Ya-Fei,YANG Zhong-Xue,WU Jian-Sheng. Catalyst-free Method of Preparing β-SiC Nanowhiskers by Using Carbon Whiskers[J]. Journal of Inorganic Materials.

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