TiO2中间层对基于溶胶-凝胶法制备的VO2薄膜 光学特性的影响

doi:10.3724/SP.J.1077.2012.12409

无机材料学报 ›› 2013, Vol. 28 ›› Issue (2): 229-234.DOI: 10.3724/SP.J.1077.2012.12409 CSTR: 32189.14.SP.J.1077.2012.12409

• • 上一篇

TiO₂中间层对基于溶胶-凝胶法制备的VO₂薄膜光学特性的影响

张玉波^1,2, 黄婉霞¹, 宋林伟¹, 颜家振¹, 施奇武¹, 张阳¹

(1．四川大学材料科学与工程学院, 成都 610064; 2. 四川工程职业技术学院, 德阳 618000)

收稿日期:2012-07-03 出版日期:2013-02-10 网络出版日期:2013-01-23
作者简介:张玉波. E-mail: zhangyb920@gmail.com

Effects of TiO₂ Interlayers on the Optical Switching of VO₂ Thin Films Grown by Sol-Gel Process

ZHANG Yu-Bo^1,2, HUANG Wan-Xia¹, SONG Lin-Wei¹, YAN Jia-Zhen¹, SHI Qi-Wu¹, ZHANG Yang¹

(1. College of Material Science and Engineering, Sichuan University, Chengdu 610064, China; 2. Sichuan Engineering Technical College, Deyang 618000, China)

Received:2012-07-03 Published:2013-02-10 Online:2013-01-23
About author:ZHANG Yu-Bo(1981–), female, candidate of PhD. E-mail: zhangyb920@gmail.com
Supported by:
Foundation item: National Natural Science Foundation of China (61072036)

摘要/Abstract

摘要：

为了提高VO₂薄膜的热致相变性能, 采用复合结构与掺杂相结合的方法, 首先通过溶胶-凝胶法在云母基底上制备锐钛型TiO₂薄膜, 再在光致亲水性处理的TiO₂/云母基底上涂覆V₂O₅以及掺钨V₂O₅水溶胶, 然后经热处理获得VO₂/TiO₂及V_xW_1-_xO₂/TiO₂复合薄膜。采用X射线衍射仪(XRD)、场发射扫描电子显微镜(FESEM)、傅立叶变换红外光谱仪(FTIR)研究薄膜的物相、表面形貌以及热致相变特性. 结果表明, VO₂/TiO₂复合薄膜晶体生长为(011)面择优取向; V_xW_1-_xO₂/TiO₂复合薄膜产生多种取向。TiO₂中间层有助于使VO₂薄膜生长致密, 相变温度降低, 更使V_xW_1-_xO₂/TiO₂复合薄膜滞后温宽降至约4℃。

关键词: 氧化钒薄膜, 复合薄膜, 溶胶-凝胶法, 光致亲水, 热致相变

Abstract:

Thermochromic VO₂ and V_xW_1-_xO₂ films were deposited on TiO₂/mica substrates. The TiO₂/mica substrates were fabricated via Sol-Gel process, and the hydrophilicity of the TiO₂/mica substrate was improved under UV light irradiated. The V₂O₅ sol was deposited on the TiO₂/mica substrate by the spin coating method, and then it was annealed. SEM and XRD analysis were applied to analyze the morphology, phases and microstructure of the films. FTIR was used to study the thermochromic properties. The results suggest that VO₂/TiO₂ grow preferentially along single orientation. V_xW_1-_xO₂/TiO₂ composite film is impossible to fabricate single orientation films. TiO₂interlayers are favorable to compact the VO₂ thin films and reduce the transition temperature. It will make the hysteresis width of V_xW_1-_xO₂/TiO₂ composite film reduce to about 4℃ particularly.

Key words: vanadium dioxide film, composite film, Sol-Gel method, photo-hydrophility, thermochromism

中图分类号:

TB332

张玉波, 黄婉霞, 宋林伟, 颜家振, 施奇武, 张阳. TiO₂中间层对基于溶胶-凝胶法制备的VO₂薄膜光学特性的影响[J]. 无机材料学报, 2013, 28(2): 229-234.

ZHANG Yu-Bo, HUANG Wan-Xia, SONG Lin-Wei, YAN Jia-Zhen, SHI Qi-Wu, ZHANG Yang. Effects of TiO₂ Interlayers on the Optical Switching of VO₂ Thin Films Grown by Sol-Gel Process[J]. Journal of Inorganic Materials, 2013, 28(2): 229-234.

图/表 6

Fig. 1 SEM image of TiO2/mica substrate surface

Fig. 2 Contact angle of TiO2/mica substrate with UV irradiation time

Fig. 3 (a) XRD patterns for three samples; (b) enlarged patterns of the diffraction peaks (011)

Table 1 Parameters of the lattice and the phase transition in samples (Ⅰ-Ⅲ)

Sample	d(110)/nm	2θ/(°)	Hysteresis width/℃	T₉₀/%	T₄₀/%	T_ΔT/T₄₀
(Ⅰ) V_xW_1-_xO₂/TiO₂ film	0.31953	27.90	7.1	75.6	10.5	92.3%
(Ⅱ) VO₂/TiO₂/mica film	0.31920	27.84	4.8	70.5	5.6	92.0%
(Ⅲ) VO₂/mica film	0.32090	27.78	9.4	66.3	4.2	93.7%

Fig. 4 SEM images of the samples

Fig. 5 Hysteresis loops (a), (b), (c) and the corresponding derivative curve (a’),(b’),(c’)

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TiO₂中间层对基于溶胶-凝胶法制备的VO₂薄膜光学特性的影响

Effects of TiO₂ Interlayers on the Optical Switching of VO₂ Thin Films Grown by Sol-Gel Process

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