基于p-n导电转变的二氧化钛对CO高温感应性能的研究

doi:10.3724/SP.J.1077.2012.00458

无机材料学报 ›› 2012, Vol. 27 ›› Issue (5): 458-462.DOI: 10.3724/SP.J.1077.2012.00458 CSTR: 32189.14.SP.J.1077.2012.00458

基于p-n导电转变的二氧化钛对CO高温感应性能的研究

张建伟, 孙芳洁, 李晓干, 余隽, 王兢, 闫卫平, 唐祯安

(大连理工大学电子科学与技术学院, 传感技术研究所, 大连116024)

收稿日期:2011-07-02 修回日期:2011-09-22 出版日期:2012-05-10 网络出版日期:2012-03-31
作者简介:张建伟(1978-), 男, 博士, 讲师. E-mail: jwzhang@dlut.edu.cn
基金资助:
国家自然科学基金(61001054, 61131004);中央高校基本科研业务费;感谢美国俄亥俄州立大学工业传感器与测试中心的Dutta博士和Akbar博士两位教授对该试验工作提供的测试条件以及提出的宝贵意见

CO Sensing Properties of TiO₂ Based on the p-n Transition Induced by Carbon Monoxide at High Temperatures

ZHANG Jian-Wei, SUN Fang-Jie, LI Xiao-Gan, YU Jun, WANG Jing, YAN Wei-Ping, TANG Zhen-An

(Institute of Sensor technologies, School of Electronic Science and Technology, Dalian University of Technology, Dalian 116024, China)

Received:2011-07-02 Revised:2011-09-22 Published:2012-05-10 Online:2012-03-31
About author:ZHANG Jian-Wei. E-mail: jwzhang@dlut.edu.cn
Supported by:
National Natural Science Foundation of China (61001054, 61131004);Fundamental Research Funds for the Central Universities

摘要/Abstract

摘要：

研究了以金红石TiO₂半导体材料为气敏材料的一氧化碳(CO)传感器在600~800℃之间的气敏性能. 该传感器在测试温度600~700℃时对20~2000 mg/m³的CO(载气为氮氧混合物且氧气含量为2%~25%)表现出p型电导行为. 随着测试温度从600℃升高至700℃, 传感器的感应强度迅速下降到接近于1. 当温度升高到750℃以上时, 传感器再次出现对CO的感应强度并且表现出n型导电行为. 随着温度升高到800℃, 传感器对CO的n型感应信号进一步增强, 表现出良好的高温感应性能. 利用交流阻抗谱仪对该TiO₂敏感材料的高温导电特性进行了研究, 并初步讨论了TiO₂在高温下对CO还原气氛的诱导导电性能变化的原因.

关键词: TiO₂, p-n导电行为转变, 高温CO传感器, 交流阻抗谱

Abstract:

Rutile TiO₂ based semiconductor-type sensors were investigated for sensing CO within the temperature range from 600℃ to 800℃. The sensor showed p-type behavior to CO (20-2000 mg/m³) when tested in oxygen concentrations varied from 10% to 2% between 600℃ and 700℃. The response of the sensor decreased significantly as the temperature increased from 600℃ to 700℃ approaching to one. However, when the temperature was above 750℃, an n-type behavior of the sensor to CO was observed. This n-type response further increased when the temperature increased to 800℃. AC impedance was employed to study the conduction behaviors of the TiO₂ thick film in both varied oxygen concentrations and CO environment at 800℃. The results indicate that the change of the oxygen ion/vacancy concentrations in the bulk TiO₂ is probably the reason for the p-n conduction transition induced by CO.

Key words: TiO₂, p-n conduction transition, high temperature CO sensors, impedance spectrum

中图分类号:

TQ174

张建伟, 孙芳洁, 李晓干, 余隽, 王兢, 闫卫平, 唐祯安. 基于p-n导电转变的二氧化钛对CO高温感应性能的研究[J]. 无机材料学报, 2012, 27(5): 458-462.

ZHANG Jian-Wei, SUN Fang-Jie, LI Xiao-Gan, YU Jun, WANG Jing, YAN Wei-Ping, TANG Zhen-An. CO Sensing Properties of TiO₂ Based on the p-n Transition Induced by Carbon Monoxide at High Temperatures[J]. Journal of Inorganic Materials, 2012, 27(5): 458-462.

图/表 6

图1 TiO2敏感厚膜的(a)XRD图谱和(b)SEM表面照片

Fig. 1 (a) XRD pattern and (b) SEM image of the surface of the TiO2 thick film

图2 (a) 不同温度下TiO2传感器对一氧化碳的感应性能; (b) TiO2在745℃时对CO表现出的p-n反型

Fig. 2 (a) Sensitivity of TiO2 sensor to CO at different temperatures from 600℃ to 800℃; (b) p-n conduction transition observed at 745℃

图3 表1 TiO2厚膜的直流和交流电阻的比较(800℃)

Fig. 3 Two probe DC resistance of TiO2 thick film in various gas environments

Table 1 Comparison of resistances of the TiO2 thick film obtained by using the two-probe DC method and AC impedance in various gas environments

Resistance/ (×10⁵, Ω)	O₂or CO
Resistance/ (×10⁵, Ω)	25%	12.5%	5%	1832 mg/cm³CO in 5%O₂
R_dc	3.91	4.11	4.30	2.28
R_ac	3.43	3.59	3.89	2.36
R_dc-R_ac	0.48	0.52	0.41	-0.08

图4 TiO2厚膜在不同气氛下的交流阻抗谱的变化

Fig. 4 AC impedance spectra of the TiO2 thick film in various gas environments

图5 TiO2传感器在800℃对不同浓度的氧气和CO的感应曲线

Fig. 5 Response curve of the TiO2 sensor to CO in different oxygen concentrations at 800℃

参考文献 17

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基于p-n导电转变的二氧化钛对CO高温感应性能的研究

CO Sensing Properties of TiO₂ Based on the p-n Transition Induced by Carbon Monoxide at High Temperatures

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基于p-n导电转变的二氧化钛对CO高温感应性能的研究

CO Sensing Properties of TiO2 Based on the p-n Transition Induced by Carbon Monoxide at High Temperatures

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CO Sensing Properties of TiO₂ Based on the p-n Transition Induced by Carbon Monoxide at High Temperatures