质子辐照对多层膜巨磁电阻结构磁性能的影响

doi:10.3724/SP.J.1077.2013.13523

无机材料学报 ›› 2014, Vol. 29 ›› Issue (3): 331-336.DOI: 10.3724/SP.J.1077.2013.13523 CSTR: 32189.14.SP.J.1077.2013.13523

• • 上一篇

质子辐照对多层膜巨磁电阻结构磁性能的影响

尹聪^1,2, 谢丹^1,2, 徐建龙^1,2, 任天令^1,2

(清华大学 1. 微电子学研究所; 2. 清华信息科学与技术国家实验室, 北京100084)

收稿日期:2013-10-14 出版日期:2014-03-20 网络出版日期:2014-02-18
作者简介:尹聪. E-mail:yin-c08@mails.tsinghua.edu.cn

Magnetic Properties of Proton Irradiated Giant Magnetoresistance Multilayers

YIN Cong^1,2, XIE Dan^1,2, XU Jian-Long^1,2, REN Tian-Ling^1,2

(1. Institute of Microelectronics, Tsinghua University, Beijing 100084, China; 2. Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 100084, China)

Received:2013-10-14 Published:2014-03-20 Online:2014-02-18
About author:YIN Cong(1988–), female, candidate of PhD. E-mail:yin-c08@mails.tsinghua.edu.cn
Supported by:
Foundation item: National Natural Science Foundation of China (61025021, 60936002, 51072089, 51372130);National Key Project of Science and Technology (2011ZX02403-002);Natural Science Foundation of Beijing (NSF 3111002)

摘要/Abstract

摘要：

研究了质子辐照对多层膜巨磁电阻结构磁性能的影响。利用5 MeV的不同辐照剂量和剂量率的质子对磁控溅射法制备的CoFe/(CoFe/Cu)₁₀/CoFe/Ta多层膜巨磁电阻结构进行辐照实验。XRD分析表明质子辐照没有改变CoFe/Cu的晶格结构。分析磁滞回线和磁电阻曲线得知在实验选取的辐照剂量范围内, 饱和磁化强度和本征电阻随着辐照剂量的增加而增加, 而矫顽场和磁电阻率随剂量的增加而减小。利用质子辐照对自旋相关散射、平均自由程的影响解释了本征电阻的变化, 并基于二流体模型对磁电阻率的变化进行了分析。由此得出, 多层膜巨磁电阻结构具有一定的抗辐照能力。

关键词: 巨磁电阻, 质子辐照, 自旋相关散射, 二流体模型

Abstract:

The magnetic properties of proton irradiated CoFe/(CoFe/Cu)₁₀/CoFe/Ta giant magnetoresistance multilayers (GMR-MLs) were investigated experimentally and theoretically. GMR-MLs were prepared by magnetron sputtering and exposed to 5 MeV proton beam with a series of radiation fluences and fluence rates. X-ray diffraction indicated that the crystal structures of CoFe/Cu were unaffected after irradiation. The saturation magnetization and intrinsic resistance increased monotonically with the increase of the radiation fluence and fluence rate. The value of MR in the irradiated samples decreased slightly with the radiation fluence, which was mainly explained by the two spin- related conductivity channel model.

Key words: giant magnetoresistance, proton irradiation, spin-related scattering, two spin-related conductivity channel

尹聪, 谢丹, 徐建龙, 任天令. 质子辐照对多层膜巨磁电阻结构磁性能的影响[J]. 无机材料学报, 2014, 29(3): 331-336.

YIN Cong, XIE Dan, XU Jian-Long, REN Tian-Ling. Magnetic Properties of Proton Irradiated Giant Magnetoresistance Multilayers[J]. Journal of Inorganic Materials, 2014, 29(3): 331-336.

图/表 7

Table 1 The proton irradiation conditions of different GMR-ML samples

Sample	Radiation fluence /(p·cm^-2)	Fluence rate /(p·cm^-2·s^-1)	Radiation time/s
S0	0	0	0
S1	10¹¹	~10⁸	988
S2	10¹²	~6×10⁸	1724
S3	10¹³	~10⁹	10208
S4	10¹¹	~8.8×10⁶	11351
S5	10¹¹	~10⁹	98

Fig. 1 Refined XRD patterns of GMR-ML samples before and after the proton irradiation at room temperature

Fig. 2 M-H curves of GMR-ML samples before and after proton irradiation at room temperature with different radiation fluences (a) and fluence rates (b)

Table 2 Results of refined parameters of proton irradiated GMR-ML samples at room temperature

Sample	M_S/(×10³, kA·m^-1)	H_C/(kA·m^-1)	R₀/Ω	MR/%
S0	1.8071	3.1682	1.9944	8.06
S1	1.8832	3.0882	1.8795	7.594
S2	1.8855	3.0792	1.8805	7.145
S3	1.9252	3.0206	6.4529	6.167
S4	1.8743	2.7296	1.3677	8.027
S5	2.0329	3.1112	2.8604	7.717

Fig. 3 Radiation fluence dependence of (a) the saturation magnetization & coercive field and (b) the intrinsic resistance & magnetoresistance ratio in proton irradiated GMR-ML samples at room temperature. The inset of (a) is the fluence rate dependence of MS and HC

Fig. 4 Magnetoresistance ratio versus the magnetic field of GMR-ML samples before and after proton irradiation at room temperature with different radiation fluences (a) and fluence rates (b)

Table 3 Calculation results of R↑ and R↓ in different GMR-ML samples

Sample	R_↑/Ω	[ΔR_↑/R_↑(S0)] /%	R_↓/Ω	[ΔR_↓/R_↓(S0)] /%
S0	0.2840	0	0.4983	0
S1	0.2704	-4.79%	0.4646	-6.76%
S2	0.2723	-4.12%	0.4590	-7.89%
S3	0.9438	2.32	1.5483	2.11
S4	0.1956	-31.13%	0.3429	-31.19%
S5	0.4100	44.37%	0.7107	42.62%

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质子辐照对多层膜巨磁电阻结构磁性能的影响

Magnetic Properties of Proton Irradiated Giant Magnetoresistance Multilayers

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