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无机材料学报

• 研究论文 • 上一篇    

燃烧化学沉积纳米α- Al2O3薄膜及晶化处理

张增志; 付跃文; 周有强   

  1. 中国矿业大学北京校区 北京 100083
  • 收稿日期:2000-12-12 修回日期:2001-02-23 出版日期:2001-11-20 网络出版日期:2001-11-20

Combustion Chemical Deposition Preparation and Crystallization of Nanocrystalline α-Al2O3 Film

ZHANG Zeng-Zhi; FU Yue-Wen; ZHOU You-Qiang   

  1. China University of Mining and Technology; Beijing Division; Bejing 100083; China
  • Received:2000-12-12 Revised:2001-02-23 Published:2001-11-20 Online:2001-11-20

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摘要： 提出了沉积纳米陶瓷薄膜的一种新方法一燃烧化学沉积法．该方法省去了真空条件；直接在空气中沉积纳米陶瓷薄膜．其主要特点是将配制好的初始液体雾化，让该液雾穿过高温火焰流体．初始液体在火焰流中发生化学反应，并形成反应火焰流，该反应火焰流体系在火焰流的前方基底上沉积出纳米陶瓷薄膜，然后再通过热处理进行晶化处理，使形成晶态相．本文以制备 α－Ａｌ２Ｏ３纳米薄膜为例，介绍用该方法的制备过程，并用ＳＥＭ和 ＴＥＭ分析了。α－Ａｌ２Ｏ３纳米薄膜的显微形貌和结构．

关键词: 纳米陶瓷, 燃烧化学, 沉积技术, α-Al2O3

Abstract: A new method for the preparation of nanocrystalline ceramic films was proposed, and α-Al2O3 films were deposited On a Ni-Al alloy substrate and then heat-treated, the films with nanocrystalline structure were characterized by SEM and TEM. The process of the new method is as follows: an initial liquid is atomized and travels through a high temperature flame, chemical reactions taking place, and deposited on a substrate, then the film obtained is heat-treated.

Key words: nanocrystalline ceramic, combustion chemistry, deposition, α-Al2O3

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