关键词: 氮化铝基板, 流延成型, 假塑性流体, 二次排胶, 沿晶断裂

Abstract: Tape casting process of aluminium nitride substrate was studied from the following aspects such as particle
size, the style of slurry fluid, drying condition and debinding mechanism. As a result, it was indicated that various particle size directly influenced the slurry viscosity and the amout of dispersant. The style of slurry fluid
suit for tape casting of AlN was pseudo plastic. The green tape with flat and smooth surface was fabricated when keeping solvent atmosphere.
Twice-debinding process was an available way to remove carbon impurity in the AlN green tape. The SEM photograph of the fractured surface of the
sintered substrate showed that crystal particle grew well, open porosity did not appear and fracture mode was intercrystalline fracture.

Key words: aluminium nitride substrate, tape casting, pseudo plastic fluid, twice-debinding process, intercrystalline fracture