电感器用Ni-Cu-Zn铁氧体薄膜的设计与性能研究

doi:10.3724/SP.J.1077.2012.00375

无机材料学报 ›› 2012, Vol. 27 ›› Issue (4): 375-378.DOI: 10.3724/SP.J.1077.2012.00375 CSTR: 32189.14.SP.J.1077.2012.00375

电感器用Ni-Cu-Zn铁氧体薄膜的设计与性能研究

范跃农^1,2, 冯则坤¹, 陈中艳¹, 龚荣洲¹

(1. 华中科技大学电子科学与技术系, 武汉 430074; 2. 景德镇陶瓷学院机电系, 景德镇 333403)

收稿日期:2011-07-08 修回日期:2011-10-09 出版日期:2012-04-10 网络出版日期:2012-03-12
基金资助:
高等学校博士学科点专项科研基金(20090142120003)

Design and Performance of Ni-Cu-Zn Ferrite Film for Inductor

FAN Yue-Nong^1,2, FENG Ze-Kun¹, CHEN Zhong-Yan¹, GONG Rong-Zhou¹

(1. Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China; 2. Department of Mechanical and Electrical, Jingdezhen Ceramic Institute, Jingdezhen 333403, China)

Received:2011-07-08 Revised:2011-10-09 Published:2012-04-10 Online:2012-03-12

摘要/Abstract

摘要：

采用丝网印刷技术制备Ni-Cu-Zn铁氧体电感器薄膜, 并对其性能进行了表征. XRD分析表明, 铁氧体薄膜具有相同的晶格结构. 研究结果表明, 在引入了铁氧体薄膜后, 电感器的电感量相对于空心电感器有30%左右的提高, 品质因数依频率不同有所改善, 共振频率有所降低. 经400℃后处理的薄膜电感器在低频时性能最好, 50 MHz时电感量提高了27%, 品质因数提高了39%.

关键词: 铁氧体薄膜, 电感量, 品质因数, 丝网印刷

Abstract:

Ni-Cu-Zn ferrite inductor film was fabricated by screen print technology, and its performances were investigated. XRD results suggest that the as-prepared thin films exhibit the same crystalline structure. The results show that after introducing of ferrite film, the inductance increases by 30%, the quality factor is improved, and the resonance frequency decrease. Ferrite inductor thin films annealed at 400℃ exhibit an optimum performance with high quality at 50 MHz, inductance increased by 27%, the quality factor increased by 39%.

Key words: ferrite film, inductance, quality factor, screen printing

中图分类号:

TM277

范跃农, 冯则坤, 陈中艳, 龚荣洲. 电感器用Ni-Cu-Zn铁氧体薄膜的设计与性能研究[J]. 无机材料学报, 2012, 27(4): 375-378.

FAN Yue-Nong, FENG Ze-Kun, CHEN Zhong-Yan, GONG Rong-Zhou. Design and Performance of Ni-Cu-Zn Ferrite Film for Inductor[J]. Journal of Inorganic Materials, 2012, 27(4): 375-378.

图/表 10

图1 铁氧体粉末的制备过程

Fig. 1 Preparation process of ferrite powder

图2 丝网印刷制备的一种典型铁氧体电感器

Fig. 2 A representative graph of inductor prepared from ferrite thin films

Table 1 Size parameters of air core inductor

Parameter	W/μm	S/μm	R/mm	n	d /μm
Air core inductor(L₀)	250	250	4.5	3	3

Table 2 Post-treatment of ferrite inductor film

T/℃	100	0-400	400	400-910	910
L1/min	240	-	-	-	-
L2/min	240	200	600	-	-
L3/min	240	200	360	160	10

图3 f 3样品的SEM照片 (a) Top view; (b) Cross-sectional view

Fig. 3 SEM images of ferrite film sample f3

图4 铁氧体薄膜的XRD图谱

Fig. 4 XRD patterns of ferrite films

图5 表3 各铁氧体薄膜样品的磁性能

Fig. 5 Ferromagnetic hysteresis loops of different ferrite films

Table 3 Magnetic property of different ferrite films

Magnetic property	H_c/(A·m^-1)	M_s/T	M_r/T
f 1	2800	0.3490	0.0464
f 2	2400	0.2607	0.0285
f 3	2080	0.3637	0.0732

图6 用于铁氧体薄膜电感器性能分析的π等效电路模型

Fig. 6 Equivalent circuit model for performance analysis of ferrite thin film inductor

图7 不同薄膜电感器的性能

Fig. 7 Performance of different ferrite film inductors

参考文献 14

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电感器用Ni-Cu-Zn铁氧体薄膜的设计与性能研究

Design and Performance of Ni-Cu-Zn Ferrite Film for Inductor

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