Journal of Inorganic Materials ›› 2013, Vol. 28 ›› Issue (7): 769-774.doi: 10.3724/SP.J.1077.2013.12498

• Research Paper • Previous Articles     Next Articles

Influence of V Content on Microstructure, Mechanical and Friction Properties of TaVN Composite Films

XU Jun-Hua, XUE Ya-Ping, CAO Jun, YU Li-Hua   

  1. (Jiangsu Key Laboratory of Advanced Welding Technology, Jiangsu University of Science and Technology, Zhenjiang 212003, China)
  • Received:2012-08-15 Revised:2012-10-15 Online:2013-07-20 Published:2013-06-19
  • Contact: XU Jun-Hua.
  • Supported by:

    National Natural Science Foundation of China(51074080); Natural Science Foundation of Jiangsu Province(BK2008240)

Abstract: A series of TaVN composite films with different V contents were fabricated by magnetron sputtering technique. The microstructures, mechanical properties, friction properties at different temperatures were investigated by X-ray diffraction, nano-indentation, CSM high-temperature ball-on-disc tribo-meter, respectively. The results show that the microstructure of TaVN films has fcc structure. With V content increasing, the preferential orientation changes from (111) to (200), and the hardness increases to a peak value (32.3 GPa) and then decreases. At room temperature, the friction coefficient of TaVN films decreases as V content increases, which may be related to the formation of V2O5. When the temperatures increase from room temperature to 800℃, the friction coefficient increases and then decreases. The friction mechanisms of TaVN composite films and TaN film at high temperature are compared based on the crystal chemistry theory.

Key words: TaVN composited films, magnetron sputtering technique, mechanical properties, friction properties

CLC Number: 

  • TG174