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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Deposition of High Quality TiN Thin Films with Nano-structure
YAN Peng-Xun,WU Zhi-Guo,XU Jian-Wei,ZHANG Yu-Juan,ZHANG Wei-Wei,LIU Wei-Min
Journal of Inorganic Materials . 2004, (
6
): 1386 -1390 .
