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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Microstructure and Optical Properties of Hydrogenated Amorphous Silicon Nitride Films Deposited by Helicon Wave Plasma Enhanced Chemical Vapor Deposition
YU Wei,HOU Hai-Hong,HE Jie,WANG Hua-Ying,FU Guang-Sheng
Journal of Inorganic Materials . 2004, (
4
): 907 -911 .
