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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Effect of Substrate Bias on Crystallization Temperature and Dielectric Properties of Sputtered Ta
2
O
5
Films
XU Shi-Long,ZHU Man-Kang,HUANG An-Ping,WANG Bo,YAN Hui
Journal of Inorganic Materials . 2004, (
3
): 701 -704 .
