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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Silicon Carbon Nitride Films Grown by Hot-Filament Chemical Vapor Deposition
NIU Xiao-Bin,LIAO Yuan,CHANG Chao,YU Qing-Xuan,FANG Rong-Chuan
Journal of Inorganic Materials . 2004, (
2
): 397 -403 .
