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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Growth Rate and Surface Morphology of Silicon Nitride Thin Films by Low Pressure Chemical Vapor Deposition
LIU Xue-Jian,JIN Cheng-Yu,ZHANG Jun-Ji,HUANG Zhi-Yong,HUANG Li-Ping
Journal of Inorganic Materials . 2004, (
2
): 379 -384 .
