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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Study on c BN Films Deposited by r f Plasma assisted CVD
ZHANG Xiao-Ling,HU Nai-Sai,HE Jia-Wen
Journal of Inorganic Materials . 1999, (
4
): 607 -612 .
