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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Effect of Plused Negative Bias on Nucleation and Morphological Evolution of ZnO Films Deposited by Reactive Radio-frequency Magnetron Sputtering
FU Wei-Jia,LIU Zhi-Wen,GU Jian-Feng,LIU Ming,ZHANG Qing-Yu
Journal of Inorganic Materials . 2009, (
3
): 602 -606 . DOI: 10.3724/SP.J1077.2009.00602
