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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Research and Development Status of Calcium Fluoride Crystals Used in Lithography System
DONG Yong-Jun,ZHOU Guo-Qing,YANG Wei-Qiao,SU Liang-Bi,XU Jun
Journal of Inorganic Materials . 2004, (
3
): 449 -455 .
