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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Fabrication of Lithium Phosphorus Oxynitride (LiPON) Thin Films by r.f. Sputtering Coupled with Electron Cyclotron Resonance
LI Chi-Lin,FU Zheng-Wen,SHU Xing-Sheng,REN Zhao-Xing
Journal of Inorganic Materials . 2006, (
1
): 193 -198 .
