Microstructure Fabrication on Negative Tone SiO2/ZrO2 Gel Film
XU Xiang,ZHOU Bin,LIU Chun-Ze,SHEN Jun,WU Guang-Ming
Journal of Inorganic Materials . 2006, (3): 753 -758 .  DOI: 10.3724/SP.J.1077.2006.00753