Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter
TAO Guilong, ZHI Guowei, LUO Tianyou, OUYANG Peidong, YI Xinyan, LI Guoqiang
Journal of Inorganic Materials . 2025, (2): 128 -144 .  DOI: 10.15541/jim20240355