High Quality GaN Epitaxy Induced Nucleation by Ar Ion Implantation into Sapphire Substrate
AN Xia, XU Shengrui, TAO Hongchang, SU Huake, YANG He, XU Kang, XIE Lei, JIA Jingyu, ZHANG Jincheng, HAO Yue
Journal of Inorganic Materials
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2025, (1): 91
-96
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DOI: 10.15541/jim20240286
