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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Correlation between Stacking Faults in Epitaxial Layers of 4H-SiC and Defects in 4H-SiC Substrate
GUO Yu, PENG Tong-Hua, LIU Chun-Jun, YANG Zhan-Wei, CAI Zhen-Li
Journal of Inorganic Materials . 2019, (
7
): 748 -754 . DOI: 10.15541/jim20180443
