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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Environmental Stable SiO
2
Antireflective Coating Modified
via
NH
3
/HTMS Vapor Phase Treatment
ZHAO Hui-Yue, WANG Xiao-Dong, FENG Jian-Bin, LIU Yuan, HUANG Ji-Chen, SHEN Jun
Journal of Inorganic Materials . 2018, (
11
): 1219 -1224 . DOI: 10.15541/jim20180033
