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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Preparation of Boron Nitride Coating from BCl
3
-NH
3
-H
2
-N
2
Precursor by Chemical Vapor Deposition
WANG Meng-Qian, JIA Lin-Tao, LI Ai-Jun, PENG Yu-Qing, ZHANG Fang-Zhou
Journal of Inorganic Materials . 2018, (
11
): 1179 -1185 . DOI: 10.15541/jim20180021
