Wet Oxidation Process to Al0.98Ga0.02As Layer for the Vertical-Cavity-Surface-Emitting-Laser Fabrications
LIN Tao, ZHANG Tian-Jie, LI Jing-Jing, GUO En-Min, NING Shao-Huan, DUAN Yu-Peng, LIN Nan, QI Qiong, MA Xiao-Yu
Journal of Inorganic Materials . 2018, (3): 266 -272 .  DOI: 10.15541/jim20170130