APS Bias Voltage on Properties of HfO2 Laser Films Deposited by Reactive Plasma Ion Assisted Electron Evaporation
FU Chao-Li, YANG Yong, MA Yun-Feng, WEI Yu-Quan, JIAO Zheng, HUANG Zheng-Ren
Journal of Inorganic Materials . 2017, (1): 69 -74 .  DOI: 10.15541/jim20160170