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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Sputtering Deposition of VO
2
Film Using Plasma Emission Monitor as Reactive Gas Flow Rate Feedback Control
WANG Xiao, YAN Lu, LI Ying, CAO Yun-Zhen
Journal of Inorganic Materials . 2015, (
11
): 1228 -1232 . DOI: 10.15541/jim20150302
