Microstructure and Luminous Property of Periodical Gradient Si-rich SiNx Thin Films
CHEN Xiao-Bo, YANG Wen, DUAN Liang-Fei, ZHANG Li-Yuan, YANG Pei-Zhi
Journal of Inorganic Materials . 2014, (12): 1270 -1274 .  DOI: 10.15541/jim20140123