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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Influence of Deposition and
in situ
Annealing Time on Composition and Optical Band Gap of h-BN Films Deposited by PECVD
QIN Yi, ZHAO Ting, WANG Bo, YANG Jian-Feng
Journal of Inorganic Materials . 2014, (
7
): 729 -734 . DOI: 10.3724/SP.J.1077.2014.13549
