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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Research Progress on Growth Rate Controlling of Atomic Layer Deposition
LU Wei-Er, DONG Ya-Bin, LI Chao-Bo, XIA Yang, LI Nan
Journal of Inorganic Materials . 2014, (
4
): 345 -351 . DOI: 10.3724/SP.J.1077.2014.13449
