Study on Etching Process and Mechanism of New Phase Change Material Ti0.5Sb2Te3
ZHANG Xu, LIU Bo, SONG San-Nian, YAO Dong-Ning, ZHU Min, RAO Feng, WU Liang-Cai, SONG Zhi-Tang, FENG Song-Lin
Journal of Inorganic Materials . 2013, (12): 1364 -1368 .  DOI: 10.3724/SP.J.1077.2013.13210