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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Substrate Effects on the Microstructure and Mechanical Properties of SiO
2
Thin Films
WANG He, HE Hong-Bo, ZHANG Wei-Li
Journal of Inorganic Materials . 2013, (
06
): 653 -658 . DOI: 10.3724/SP.J.1077.2013.12461
