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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Studies on H
2
O-based Atomic Layer Deposition of Al
2
O
3
Dielectric on Pristine Graphene
ZHANG You-Wei, WAN Li, CHENG Xin-Hong, WANG Zhong-Jian, XIA Chao, CAO Duo, JIA Ting-Ting, YU Yue-Hui
Journal of Inorganic Materials . 2012, (
9
): 956 -960 . DOI: 10.3724/SP.J.1077.2012.11663
