High-speed Homoepitaxial Growth of 4H-SiC
ZHU Ming-Xing, SHI Biao, CHEN Yi, LIU Xue-Chao, SHI Er-Wei
Journal of Inorganic Materials . 2012, (8): 785 -789 .  DOI: 10.3724/SP.J.1077.2012.11577