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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Effect of Target Composition and Sputtering Parameters on Microstructure and Mechanical Properties of Vanadium Carbide Films
SHEN Jie, LI Guan-Qun, LI Yu-Ge, LI Ge-Yang
Journal of Inorganic Materials . 2012, (
5
): 536 -540 . DOI: 10.3724/SP.J.1077.2012.00536
