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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Effect of Annealing Temperature on the Structure andTribological Propertyof a-C:H Film
WANG Yong-Xia, YE Yin-Ping, LIHong-Xuan, JI Li, CHEN Jian-Min, ZHOUHui-Di
Journal of Inorganic Materials . 2011, (
2
): 209 -213 . DOI: 10.3724/SP.J.1077.2011.00209
