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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Defects and Microstructures in the Surface Layer of Single-crystal Silicon Induced by High-current Pulsed Electron Beam
WANG Xue-Tao, GUAN Qing-Feng, GU Qian-Qian, PENG Dong-Jin, LI Yan1, CHEN Bo
Journal of Inorganic Materials . 2010, (
12
): 1313 -1317 . DOI: 10.3724/SP.J.1077.2010.01313
