Progress in Materials Used for Solidly Mounted Film Bulk Acoustic Resonators
LIU Gang, ZHU Jia-Qi, WANG Sai, LU Xiao-Xin, LIU Yuan-Peng, HUO Shi-Yu, YUAN Xin-Wei
Journal of Inorganic Materials . 2010, (12): 1233 -1241 .  DOI: 10.3724/SP.J.1077.2010.01233