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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Determination of Oxygen Concentration in Heavily Doped Silicon Wafer by Laser Induced Breakdown Spectroscopy
JI Zhen-Guo, XI Jun-Hua, MAO Qi-Nan
Journal of Inorganic Materials . 2010, (
8
): 893 -896 . DOI: 10.3724/SP.J.1077.2010.10074
