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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Analysis of Gaseous Species in Chemical Vapor Deposition of SiC from MTS/H
2
LU Cui-Ying, CHENG Lai-Fei, ZHAO Chun-Nian, ZHANG Li-Tong
Journal of Inorganic Materials . 2010, (
8
): 845 -850 . DOI: 10.3724/SP.J.1077.2010.00845
