Structure and Dielectric Properties of HfO2 Thin Films
CHENG Xue-Rui-1, QI Ze-Ming-2, 3 , ZHANG Guo-Bin-2, 3 , LI Ting-Ting-2, 3 , HE Bo-2, 3 , YIN Min-1
Journal of Inorganic Materials . 2010, (5): 468 -472 .  DOI: 10.3724/SP.J.1077.2010.00468