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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Effect of High-Temperature Annealing on the Structure of Reactive-Sputtering a-SiC:H Films
WANG Yinyue,WANG Huiyao,WANG Jizheng,GUO Yongping,CHEN Guanghua
Journal of Inorganic Materials . 1997, (
3
): 351 -355 .
