Influence of Doped Cu-Zn on Structure and Properties of TiN Films
WEI Chun-Bei,GONG Chun-Zhi,TIAN Xiu-Bo,YANG Shi-Qin
Journal of Inorganic Materials . 2009, (6): 1231 -1235 .  DOI: 10.3724/SP.J.1077.2009.01231