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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Equilibrium Prediction of the Role of Key Species in the Chemical Vapor Deposition of Silicon Carbide
LU Cui-Ying,CHENG Lai-Fei,ZHANG Li-Tong,XU Yong-Dong,ZHAO Chun-Nian
Journal of Inorganic Materials . 2008, (
6
): 1189 -1192 . DOI: 10.3724/SP.J.1077.2008.01189
