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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Atomic Scale Simulation of {111}-Oriented SiC Film Growth by Chemical Vapor Deposition Method
LIU Cui-Xia,YANG Yan-Qing,HUANG Bin,ZHANG Rong-Jun,LUO Xian,REN Xiao-Xia
Journal of Inorganic Materials . 2008, (
5
): 933 -937 . DOI: 10.3724/SP.J.1077.2008.00933
