Superhardness Effect and High Temperature Oxidation Resistance of AlN/SiO2 Nano-multilayers
WU Ying,ZHAO Wen-Ji,KONG Ming,HUANG Bi-Long,LI Ge-Yang
Journal of Inorganic Materials . 2008, (3): 562 -566 .  DOI: 10.3724/SP.J.1077.2008.00562