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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Effect of H
2
Flow Rate on Microstructure and Optical Property of Nanocrystalline SiC Films
YU Wei,DU Jie,ZHANG Li,CUI Shuang-Kui,LU Wan-Bing,FU Guang-Sheng
Journal of Inorganic Materials . 2008, (
3
): 540 -544 . DOI: 10.3724/SP.J.1077.2008.00540
