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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Fabrication of Polycrystalline Silicon Films with Columnar Grains Structure on Quartz
ZHANG Li-Wei,ZHOU Ling-Li,LI Rui,LI Hong-Ju,LU Jing-Xiao
Journal of Inorganic Materials . 2008, (
2
): 369 -372 . DOI: 10.3724/SP.J.1077.2008.00369
