Structural Characteristics of Amorphous Er2O3 Films Grown on Si (001) by Reactive Evaporation
FANG Ze-Bo,TAN Yong-Sheng,ZHU Yan-Yan,CHEN Sheng,JIANG Zui-Min
Journal of Inorganic Materials . 2008, (2): 357 -360 .  DOI: 10.3724/SP.J.1077.2008.00357