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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Structure and Properties of C-N Films Prepared by Hot Filament Assisted rf Plasma CVD
CHEN Guang-Hua,WU Xian-Cheng,HE De-Yan
Journal of Inorganic Materials . 2001, (
2
): 377 -380 .
